Semiconductor devices

ABSTRACT

A semiconductor device may include a substrate, an interface insulation pattern, a gate insulation pattern, a threshold voltage controlling metal pattern and a conductive pattern. The interface insulation pattern may be formed on the substrate. The gate insulation pattern including an oxide having a dielectric constant higher than that of silicon oxide may be formed on the interface insulation pattern. The threshold voltage controlling metal pattern may be formed on the gate insulation pattern. The conductive pattern may be formed on the threshold voltage controlling metal pattern. First dopants including at least fluorine may be included within and at at least one surface of the gate insulation pattern and at an upper surface of an interface insulation pattern contacting the gate insulation pattern. The semiconductor device may have excellent electrical characteristics.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a continuation of and claims priority under 35 U.S.C. §120 to U.S. patent application Ser. No. 16/837,408, filed on Apr. 1, 2020, which claims the benefit of Korean Patent Application No. 10-2019-0089016, filed on Jul. 23, 2019, in the Korean Intellectual Property Office (KIPO), the contents of which are incorporated by reference herein in their entirety.

BACKGROUND 1. Field

Example embodiments relate to semiconductor devices. More particularly, example embodiments relate to semiconductor devices including transistors.

2. Description of the Related Art

A transistor included in a semiconductor device should have sufficient electrical properties. For example, the transistor may have a reduced leakage current and/or a larger on current. In order to improve the electrical properties of the transistor, a gate structure may include a gate insulation layer having a small defect.

SUMMARY

Example embodiments provide a semiconductor device having sufficient characteristics.

Example embodiments provide methods of manufacturing the semiconductor device.

According to example embodiments, there is provided a semiconductor device that may include a substrate, an interface insulation pattern, a gate insulation pattern, a threshold voltage controlling metal pattern and a conductive pattern. The interface insulation pattern may be on the substrate. The gate insulation pattern may be on the interface insulation pattern. The gate insulation pattern may include an oxide having a dielectric constant higher than that of silicon oxide. The threshold voltage controlling metal pattern may be on the gate insulation pattern. The conductive pattern may be on the threshold voltage controlling metal pattern. First dopants may be present within and at at least one surface of the gate insulation pattern and at an upper surface of the interface insulation pattern contacting the gate insulation pattern. The first dopants may include at least fluorine.

According to example embodiments, there is provided a semiconductor device that may include a substrate, an interface insulation pattern, a gate insulation pattern, a threshold voltage controlling metal pattern, a conductive pattern and impurity regions. The substrate may include a recess. The interface insulation pattern may be conformal to a surface of the recess. The gate insulation pattern may be on the interface insulation pattern. The gate insulation pattern may include an oxide having a dielectric constant higher than that of silicon oxide. The threshold voltage controlling metal pattern may be on the gate insulation pattern. The conductive pattern may be formed on the threshold voltage controlling metal pattern. The conductive pattern may include a polysilicon pattern doped with N-type or P-type impurities and an upper metal pattern including a metal having a resistance lower than that of the polysilicon pattern. The impurity regions serving as source/drain regions may be in the substrate on adjacent sides of the recess. The first dopants may be present within and at at least one surface of the gate insulation pattern and at an upper surface of the interface insulation pattern contacting the gate insulation pattern. The first dopants may include at least fluorine. A stacked structure including the interface insulation pattern, the gate insulation pattern, the threshold voltage controlling metal pattern and the conductive pattern may be in the recess.

According to example embodiments, there is provided a semiconductor device that may include a substrate, a gate insulation pattern and a conductive pattern. The substrate may include a recess. The gate insulation pattern may be conformal to the substrate. The conductive pattern may be on the gate insulation pattern. The conductive pattern may include a polysilicon pattern doped with N-type or P-type impurities and an upper metal pattern. First dopants may be in the gate insulation pattern and at an upper and on lower interfaces of the gate insulation pattern. The first dopants may include at least fluorine. A stacked structure including the gate insulation pattern and the conductive pattern may be in the recess.

According to example embodiments, there is provided a method of manufacturing a semiconductor device. In the method, a preliminary gate insulation layer may be formed on a substrate. A lower polysilicon layer may be formed on the preliminary gate insulation layer. The lower polysilicon layer may be doped with first dopants including at least fluorine. The first dopants included in the lower polysilicon may be diffused within and at an upper and lower interface of the preliminary gate insulation to form a gate insulation layer including the first dopants within and at at least one of an upper and lower interface thereof. A polysilicon layer may be formed on the gate insulation layer. The polysilicon may be doped with N-type or P-type impurities. The polysilicon layer and the gate insulation layer may be patterned to form a gate structure including a gate insulation pattern and a polysilicon pattern on the substrate.

In example embodiments, in a transistor of the semiconductor device, the first dopants including at least fluorine may be included within and at at least one surface of the gate insulation pattern and at an upper surface of an interface insulation pattern contacting the gate insulation pattern. Defects may be cured by the first dopants, so that the defects of the upper surface of the interface insulation pattern contacting the gate insulation pattern and the gate insulation pattern may be reduced. Thus, the transistor has a reduced leakage current due to the defects, and may have a higher on current. Therefore, the semiconductor device may have improved electrical characteristics.

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings. FIGS. 1 to 25 represent non-limiting, example embodiments as described herein.

FIG. 1 is a cross-sectional view illustrating a transistor in accordance with example embodiments;

FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIGS. 3, 4A, 5 to 6 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments;

FIG. 4B is concentration gradients of dopants when implanting dopants by ion implantation process, and by diffusion from a polysilicon layer, respectively;

FIG. 7 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 8 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIGS. 9 and 10 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments;

FIG. 11 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIGS. 12 and 13 are cross-sectional views illustrating stages of a method of manufacturing a transistor in accordance with example embodiments;

FIG. 14 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 15 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 16 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 17 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 18 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIG. 19 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments;

FIGS. 20 to 24 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments; and

FIG. 25 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

DESCRIPTION OF EMBODIMENTS

FIG. 1 is a cross-sectional view illustrating a transistor in accordance with example embodiments. The transistor shown in FIG. 1 may be a recessed channel transistor.

Referring to FIG. 1, a substrate 100 may include a semiconductor material such as single crystal silicon.

A recess 101 may be formed at a portion of the substrate 100 for forming a gate structure. In example embodiments, the recess 101 may extend in a first direction parallel to a surface of the substrate 100.

The recess 101 may have a first depth from the surface of the substrate 100. A gate structure may fill the recess 101, and the gate structure may protrude from an upper surface of the substrate 100.

An interface insulation pattern 102 a may be conformally formed on a sidewall and a bottom of the recess 101. In example embodiments, the interface insulation pattern 102 a may extend to the upper surface of the substrate 100 adjacent to the recess 101.

In example embodiments, the interface insulation pattern 102 a may include silicon oxide or silicon oxynitride. The interface insulation pattern 102 a may be formed to reduce or prevent the substrate 100 and a gate insulation pattern 104 a from directly contacting to each other. Thus, the interface insulation pattern 102 a may be interposed between the substrate 100 and the gate insulation pattern 104 a.

The gate insulation pattern 104 a may be conformally formed on the interface insulation pattern 102 a. In example embodiments, the gate insulation pattern 104 a may include an oxide having a high dielectric constant. For example, the gate insulation pattern 104 a may have a dielectric constant higher than that of silicon oxide. The gate insulation pattern 104 a may be, e.g., hafnium oxide, hafnium silicon oxide, lanthanum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, lithium oxide, aluminum oxide or the like.

In example embodiments, first dopants may be included in the gate insulation pattern 104 a and on upper and lower interfaces of the gate insulation pattern 104 a. That is, the first dopants may be included within and at a surface of the gate insulation pattern 104 a and at an upper surface of the interface insulation pattern 102 a contacting the gate insulation pattern 104 a. The first dopants may be doped to cure crystal defects included within and at at least one surface of the gate insulation pattern 104 a and the upper surface of the interface insulation pattern 102 a contacting the gate insulation pattern 104 a. That is, the first dopants may be combined with dangling bonds or vacancy included within and at a surface of the gate insulation pattern 104 a and the upper surface of the interface insulation pattern 102 a contacting the gate insulation pattern 104 a, so that defects of the upper and lower interfaces of the gate insulation pattern 104 a and the gate insulation pattern 104 a may be cured (or removed).

A concentration of the first dopants may be decreased at a constant rate from the upper surface of the gate insulation pattern 104 a toward an inside of the gate insulation pattern 104 a. That is, the first dopants may not have a curve gradient in which concentration is greatly increased or decreased at specific regions within the gate insulation pattern 104 a. Thus, the first dopants included in the gate insulation pattern 104 a may have a uniform concentration at each position having the same distance from the upper surface of the gate insulating pattern 104 a. The concentration of the first dopants included in the gate insulation pattern 104 a may have high uniformity. . That is, even though the gate insulation pattern 104 a is conformally formed on the surface of the recess 101, a concentration gradient of the first dopants may not be large. Thus, defects of the gate insulation pattern 104 a may be cured by the first dopants, so that the gate insulation pattern 104 a may have excellent characteristics. Therefore, leakage currents of the transistor due to the defects of the gate insulation pattern 104 a may be decreased.

In example embodiments, the first dopants may include a material having a chemical bonding strength higher than that of hydrogen. In example embodiments, the first dopants may include fluorine. In example embodiments, the first dopants may include fluorine, and may further include nitrogen, phosphorus, boron, or gallium.

A threshold voltage controlling metal pattern 106 a may be formed on the gate insulation pattern 104 a. The threshold voltage controlling metal pattern 106 a may include, e.g., TiN, TiSiN, TiAlN, TaN, AlN, WN, MoN, WCN, La, LaO, LaN, cadmium, chromium, yttrium, cerium, scandium, strontium, erbium, or the like. The materials may be used alone or two or more stacked.

In example embodiments, when an NMOS transistor is formed, the threshold voltage controlling metal pattern 106 a directly contacting the gate insulation pattern 104 a may include an N-type metal having a first work function. For example, the N-type metal may include La, LaO, and/or LaN.

In example embodiments, when a PMOS transistor is formed, the threshold voltage controlling metal pattern 106 a directly contacting the gate insulation pattern 104 a may have a P-type metal having a second work function higher than the first work function. For example, the P-type metal may include TiN.

In example embodiments, the threshold voltage controlling metal pattern 106 a may further include dopants substantially the same as the first dopants.

A polysilicon pattern 110 a may be formed on the threshold voltage controlling metal pattern 106 a. The polysilicon pattern 110 a may be doped with conductive impurities such as N-type impurities or P-type impurities. For example, the polysilicon pattern may be doped with impurities such as As, Sb, P, B, and In. In example embodiments, the polysilicon pattern 110 a may directly contact the threshold voltage controlling metal pattern 106 a.

In example embodiments, the polysilicon pattern 110 a may completely fill remaining space of the recess 101. In example embodiments, an upper surface of the polysilicon pattern 110 a may be higher than the upper surface of the substrate 100.

An upper metal pattern 114 a and a hard mask pattern 116 may be formed on the polysilicon pattern 110 a. The upper metal pattern 114 a may be formed to decrease a resistance of the gate electrode. Thus, the upper metal pattern 114 a may include a metal having a resistance lower than that of the polysilicon pattern 110 a. The upper metal pattern 114 a may include, e.g., tungsten, aluminum, copper, cobalt, or the like.

In example embodiments, a diffusion barrier pattern 112 a may be further formed between the polysilicon pattern 110 a and the upper metal pattern 114 a. The diffusion barrier pattern 112 a may be reduce or prevent impurities of the polysilicon pattern 110 a from diffusing upwardly. Also, the diffusion barrier pattern 112 a may serve as an adhesion layer for contacting between the upper metal pattern 114 a and the polysilicon pattern 110 a. The diffusion barrier pattern 112 a may include, e.g., a metal or metal nitride such as titanium, tantalum, titanium nitride (TiNx), TiSiN, TiAlN, TaN, AlN, tungsten nitride (WNx), or the like.

The hard mask pattern 116 may include, e.g., silicon nitride or silicon oxide.

As described above, a gate structure including the interface insulation pattern 102 a, the gate insulation pattern 104 a, the threshold voltage controlling metal pattern 106 a, the polysilicon pattern 110 a, the diffusion barrier pattern 112 a, the upper metal pattern and/or the hard mask stacked may be formed in the recess. The polysilicon pattern 110 a, the diffusion barrier pattern 112 a and/or the upper metal pattern 114 a may serve as a conductive pattern.

Impurity regions 120 may be formed at upper portions of the substrate 100 adjacent sides of the gate structure. The impurity regions 120 may serve as source/drain regions.

In example embodiments, the transistor of the semiconductor device may serve as a peripheral circuit of a memory device. The memory device may be a DRAM device, an SRAM device, a flash memory device, a logic device, or the like. In some example embodiments, the transistor may serve as a part of a memory cell in a DRAM device.

As described above, the first dopants may be uniformly included in the gate insulation pattern 104 a and on the upper and lower interfaces of the gate insulation pattern 104 a, so that the transistor may have improved electrical characteristics.

FIG. 2 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 2 may be substantially the same as the semiconductor device shown in FIG. 1, except for a stacked structure of the gate structure.

Referring to FIG. 2, the gate structure may include the interface insulation pattern 102 a, the gate insulation pattern 104 a, the threshold voltage controlling metal pattern 106 a, a lower polysilicon pattern 108 a, the polysilicon pattern 110 a, the diffusion barrier pattern 112 a, the upper metal pattern 114 a and/or the hard mask pattern 116 stacked. That is, the lower polysilicon pattern 108 a may be further formed between the threshold voltage controlling metal pattern 106 a and the polysilicon pattern 110 a.

In example embodiments, the lower polysilicon pattern 108 a may be conformally formed on the threshold voltage controlling metal pattern 106 a. That is, the lower polysilicon pattern 108 a may directly contact the threshold voltage controlling metal pattern 106 a. The lower polysilicon pattern 108 a formed on the threshold voltage controlling metal pattern 106 a may have a uniform thickness. Also, the lower polysilicon pattern 108 a may not completely fill the recess 101.

In example embodiments, the lower polysilicon pattern 108 a may be doped with second dopants which may be substantially the same as the first dopants doped in the gate insulation pattern 104 a. That is, the second dopants may include fluorine. In some example embodiments, the second dopants may include fluorine, and may further include nitrogen, phosphorus, boron or gallium.

The lower polysilicon pattern 108 a may be a doping source layer for doping first dopants to the gate insulation pattern 104 a formed below. That is, second dopants doped in the lower polysilicon pattern 108 a may be downward diffused to form the first dopants included in the gate insulation pattern 104 a.

The lower polysilicon pattern 108 a may have a thickness less than that of the polysilicon pattern 110 a. For example, the lower polysilicon pattern 108 a may have a thickness of about 5 Å to about 100 Å. When the lower polysilicon pattern 108 a is less than 5 Å, the lower polysilicon pattern 108 a may not be served as a doping source layer for doping first dopants. When the lower polysilicon pattern 108 a is greater than 100 Å, a resistance of the gate structure may increase.

FIGS. 3, 4A, 5 to 6 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments. FIG. 4B is concentration gradients of dopants when implanting dopants by ion implantation, and by diffusion from a polysilicon layer, respectively

Referring to FIG. 3, an upper portion of a substrate 100 may be partially etched to form a recess 101. An interface insulation layer 102 may be conformally formed on an inner surface of the recess 101 and an upper surface of the substrate 100.

In example embodiments, the process of forming the interface insulation layer 102 may include a radical oxidation process, an in situ steam generation (ISSG) process or a UV oxidation process.

In example embodiments, a plasma nitridation and a heat treatment may be additionally performed after forming the interface insulation layer 102. The plasma nitridation process may include a radical flow nitridation (RFN) or a decoupled plasma nitridation (DPN).

A preliminary gate insulation layer 103 may be conformally formed on the interface insulation layer 102. A threshold voltage controlling metal layer 106 may be conformally formed on the preliminary gate insulation layer 103. A process for forming the preliminary gate insulation layer 103 may include a chemical vapor deposition process or an atomic layer deposition process.

In example embodiments, the plasma nitridation process and the heat treatment process may be further performed after forming the preliminary gate insulation layer 103. The heat treatment process may include, e.g., a peak thermal anneal (RTA), a spike RTA, a millisecond anneal or the like.

Referring to FIG. 4A, a lower polysilicon layer 108 may be conformally formed on the threshold voltage controlling metal layer 106. During deposition process for forming the lower polysilicon layer 108, second dopants may be doped in situ. Therefore, the second dopants may be uniformly doped into the lower polysilicon layer 108.

In example embodiments, the second dopants included in the lower polysilicon layer 108 may include fluorine. For example, the second dopants may include F or BF₂. In some embodiments, the second dopants included in the lower polysilicon layer 108 may include fluorine, and may further include nitrogen, phosphorus, boron, or gallium.

The lower polysilicon layer 108 may be a doping source layer for doping first dopants to the preliminary gate insulation layer 103. Thus, a concentration of second dopants doped in the lower polysilicon pattern 108 a may be controlled, so that amount of the first dopants included in the gate insulation layer may be controlled. In example embodiments, the concentration of the second dopants doped in the lower polysilicon layer 108 may be controlled, e.g., in the range of about 0.1% to about 20%.

In example embodiments, the lower polysilicon layer 108 may have a uniform thickness from a surface of the threshold voltage controlling metal layer 106. Also, the lower polysilicon layer 108 may not completely fill the recess 101. The amount of the first dopants included in the gate insulation layer may be controlled by a thickness of the lower polysilicon layer 108.

In example embodiments, when the lower polysilicon layer 108 is removed by subsequent processes, the lower polysilicon layer 108 may be formed to have a thickness of about 5 Å to about 300 Å.

In some example embodiments, when the lower polysilicon layer 108 is not removed by subsequent processes, the lower polysilicon layer 108 may be formed to have a thin thickness of about 5 Å to about 100 Å.

Then, the lower polysilicon layer 108 may be heat-treated to downwardly diffuse the second dopants in the lower polysilicon layer 108, so that a gate insulation layer 104 doped with first dopants may be formed. The first dopants may be substantially the same as the second dopants. The first dopants may be included in the gate insulation layer 104 and on upper and lower interfaces of the gate insulation layer 104. That is, the first dopants may be included within and at at least one surface of the gate insulation layer 104 and at an upper surface of the interface insulation layer 102 contacting the gate insulation layer 104. The heat treatment process may be performed, e.g., at a temperature of about 700° C. to about 1000° C.

In the FIG. 4B, a reference numeral 10 is concentration gradients of dopants when the dopants are implanted by the ion implantation process. Also, a reference numeral 12 is concentration gradients of dopants when the dopants are doped by diffusion from a polysilicon layer.

When dopants are implanted by an ion implantation process into a layer 14 having a flat upper surface, a region of a certain depth from the upper surface of the layer 14 may have a high doping concentration. When the ion implantation process is performed, the doping concentration may have a curved gradient, so that the dopants may not be uniformly doped into the layer 14.

Further, when the dopants are implanted in the preliminary gate insulation layer by the ion implantation process, angles of ion implanted into the preliminary gate insulation layer may be different from each other, according to positions of the surfaces of the preliminary gate insulation layer. That is, an angle of ion implanted into the preliminary gate insulation layer formed on the sidewalls of the recess and an angle of ion implanted into the preliminary gate insulation layer formed on the bottom of the recess may be different from each other. Thus, the dopants may not be uniformly doped into portions of the preliminary gate insulation layer formed on the sidewall and the bottom of the recess 101.

In addition, when dopants are implanted into the preliminary gate insulation layer by the ion implantation process, the surface of the substrate and the layers may be damaged by the ion implantation. However, the first dopants may be uniformly doped into the gate insulation layer 104 by diffusing the second dopants in the lower polysilicon layer 108 downwardly. When the diffusion process is performed, the doping concentration may not have a curved gradient. When the dopants are doped by the diffusion process, a concentration of the dopants may be decreased at a constant rate from the upper surface of the preliminary gate insulation layer 103 toward an inside of the preliminary gate insulation layer 103. Therefore, the concentration of first dopants included in the gate insulation layer 104 may have a high uniformity.

In example embodiments, when the second dopants are downwardly diffused, dopants may be partially doped in the threshold voltage controlling metal layer 106. Therefore, the threshold voltage controlling metal layer 106 may be doped with a third dopants substantially the same as the first dopants.

Referring to FIG. 5, the lower polysilicon layer 108 may be removed. The removing process of the lower polysilicon layer 108 may include an isotropic etching process.

In some example embodiments, the removing process for the lower polysilicon layer 108 may not be performed. If subsequent processes are performed in the same manner without removing the lower polysilicon layer 108, the semiconductor device shown in FIG. 2 may be manufactured.

Although not shown, in some example embodiments, a sequence of the processes described above may be changed. For example, before forming the threshold voltage controlling metal layer 106, the lower polysilicon layer 108 may be formed on the preliminary gate insulation layer 103, and then second dopants included in the lower polysilicon layer 108 may be downwardly diffused to form a gate insulation layer 104 including the first dopants. In addition, after forming the gate insulation layer, the lower polysilicon layer 108 may be removed. Thereafter, the threshold voltage controlling metal layer 106 may be formed on the gate insulation layer 104. In example embodiments, the threshold voltage controlling metal layer 106 may not include the dopants the same as the first dopants.

Referring to FIG. 6, a polysilicon layer 110 may be formed on the threshold voltage controlling metal layer 106. During the deposition process for forming the polysilicon layer 110, N-type impurities or P-type impurities may be doped in situ. The polysilicon layer 110 may be formed to fill remaining space of the recess 101.

A diffusion barrier layer 112, an upper metal layer 114 and a hard mask layer may be sequentially formed on the polysilicon layer 110. The hard mask layer may be patterned to form a hard mask pattern 116.

Referring to FIG. 1 again, the upper metal layer 114, the diffusion barrier layer 112, the polysilicon layer 110, the threshold voltage controlling metal layer 106, the gate insulation layer 104 and the interface insulation layer 102 may be etched using the hard mask pattern as an etching mask to form a gate structure in the recess. The gate structure may include an interface insulation pattern 102 a, a gate insulation pattern 104 a, a threshold voltage controlling metal pattern 106 a, a polysilicon pattern 110 a, a diffusion barrier pattern 112 a, an upper metal pattern 114 a and the hard mask pattern 116 stacked.

Thereafter, impurities may be doped on the substrate 100 to form impurity regions 120 at upper portions of the substrate 100 adjacent to sides of the gate structure. In example embodiments, a bottom of each of the impurity regions 120 may be higher than a bottom of the recess 101.

In some example embodiments, the doping process for forming the impurity regions 120 may be performed before forming the recess 101 illustrated with reference to FIG. 3.

FIG. 7 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 7 may be substantially the same as the semiconductor device shown in FIG. 1, except for a stacked structure of the gate structure.

Referring to FIG. 7, the gate structure may include the gate insulation pattern 104 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and/or the hard mask pattern 116.

The gate insulation pattern 104 a may be conformally formed on a sidewall and a bottom of the recess 101. In example embodiments, the gate insulation pattern 104 a may include silicon oxide.

In example embodiments, the first dopants may be doped in the gate insulation pattern 104 a and on upper and lower interfaces of the gate insulation pattern 104 a. That is, the first dopants may be doped within and at a surface of the gate insulation pattern 104 a and at an upper surface of the substrate 100 contacting the gate insulation pattern 104 a.

The polysilicon pattern 110 a may be formed on the gate insulation pattern 104 a. The polysilicon pattern 110 a may be doped with N-type impurities or P-type impurities. The polysilicon pattern 110 a may fill remaining space of the recess 101. In example embodiments, an upper surface of the polysilicon pattern 110 a may be higher than an upper surface of the substrate 100.

The upper metal pattern 114 a and the hard mask pattern 116 may be substantially the same as those illustrated with reference to FIG. 1, respectively. In some example embodiments, a diffusion barrier pattern (not shown) may be further formed between the polysilicon pattern 110 a and the upper metal pattern 114 a.

FIG. 8 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 8 may be substantially the same as the semiconductor device shown in FIG. 7, except for a stacked structure of the gate structure.

Referring to FIG. 8, the gate structure may include the gate insulation pattern 104 a, the lower polysilicon pattern 108 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and/or the hard mask pattern 116. That is, the lower polysilicon pattern 108 a may be further formed between the gate insulation pattern 104 a and the polysilicon pattern 110 a. The lower polysilicon pattern 108 a may be substantially the same as that illustrated with reference to FIG. 2. In some example embodiments, a diffusion barrier pattern (not shown) may be further formed between the polysilicon pattern 110 a and the upper metal pattern 114 a.

FIGS. 9 and 10 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments.

Referring to FIG. 9, an upper portion of the substrate 100 may be partially etched to form the recess 101. A preliminary gate insulation layer may be conformally formed on an inner surface of the recess 101 and an upper surface of the substrate 100.

In example embodiments, a plasma nitridation and a heat treatment may be further performed, after forming the preliminary gate insulation layer.

The lower polysilicon layer 108 may be conformally formed on the preliminary gate insulation layer. The second dopants may be doped in situ, during the deposition process of forming the lower polysilicon layer 108. The process for forming the lower polysilicon layer 108 may be substantially the same as that illustrated with reference to FIG. 4.

Thereafter, the lower polysilicon layer 108 may be heat-treated to downwardly diffuse the second dopants in the lower polysilicon layer 108, so that the gate insulation layer 104 doped with first dopants may be formed. The first dopants may be doped in the gate insulation layer 104 and on upper and lower interfaces of the gate insulation layer 104, and the first dopants may be substantially the same as the second dopants. That is, the first dopants may be doped within and at at least one surface of the gate insulation layer 104 and a surface of the substrate 100 contacting the gate insulation layer 104.

Referring to FIG. 10, the lower polysilicon layer 108 may be removed. The removing process of the lower polysilicon layer 108 may include an isotropic etching process.

In some example embodiments, the removing process of the lower polysilicon layer 108 may not be performed. When subsequent processes are performed in the same manner without removing the lower polysilicon layer 108, the semiconductor device shown in FIG. 8 may be manufactured.

Thereafter, the polysilicon layer 110 may be formed on the gate insulation layer 104. During deposition process for forming the polysilicon layer 110, N-type impurities or P-type impurities may be doped in situ.

The upper metal layer 114 and the hard mask layer may be sequentially formed on the polysilicon layer 110. The hard mask layer may be patterned to form a hard mask pattern 116. In some example embodiments, the diffusion barrier layer may be further formed between the polysilicon layer 110 and the upper metal layer 114.

Referring to FIG. 7 again, the upper metal layer 114, the polysilicon layer 110 and the gate insulation layer 104 may be etched using the hard mask pattern 116 as an etch mask. Thus, a gate structure may be formed in the recess 101, and the gate structure may include the gate insulation pattern 104 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and the hard mask pattern 116.

Thereafter, impurities may be doped on the substrate 100 to form the impurity regions 120 at upper portions of the substrate 100 adjacent to sides of the gate structure.

In some example embodiments, the doping process for forming the impurity regions 120 may be performed before forming the recess 101 illustrated with reference to FIG. 9.

FIG. 11 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 11 may be substantially the same as the semiconductor device shown in FIG. 1, except that a gate structure is formed only in a recess.

Referring to FIG. 11, the interface insulation pattern 102 a and the gate insulation pattern 104 a may be conformally formed on a sidewall and a bottom of the recess 101.

The threshold voltage controlling metal pattern 106 a and the polysilicon pattern 110 a may be formed on the gate insulation pattern 104 a to fill a lower portion of the recess 101.

The upper metal pattern 114 a and the hard mask pattern 116 may be formed on the polysilicon pattern 110 a to fill an upper portion of the recess 101.

In example embodiments, a gate structure may include the interface insulation pattern 102 a, the gate insulation pattern 104 a, the threshold voltage controlling metal pattern 106 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and/or the hard mask pattern 116 stacked. An upper surface of the gate structure may be coplanar with a flat upper surface of the substrate 100.

In some example embodiments, the lower polysilicon pattern may be further formed between the threshold voltage controlling metal pattern 106 a and the polysilicon pattern 110 a.

In some example embodiments, the diffusion barrier pattern may be further formed between the polysilicon pattern 110 a and the hard mask pattern.

The impurity regions 120 may be formed at upper portions of the substrate 100 adjacent to sides of the gate structure. In example embodiments, a bottom of each of the impurity regions 120 may be lower than a bottom of the hard mask pattern 116.

FIGS. 12 and 13 are cross-sectional views illustrating stages of a method of manufacturing a transistor in accordance with example embodiments.

Referring to FIG. 12, the processes as illustrated with reference to FIGS. 3 and 4 are performed. Thus, the interface insulation layer 102, the gate insulation layer 104, the threshold voltage controlling metal layer 106 and/or the lower polysilicon layer 108 may be formed on surfaces of the substrate 100 and the recess 101.

Referring to FIG. 13, the lower polysilicon layer 108 may be removed. Then, the polysilicon layer may be formed on the threshold voltage controlling metal layer 106.

The polysilicon layer, the threshold voltage controlling metal layer 106, the gate insulation layer 104 and the interface insulation layer 102 may be planarized until an upper surface of the substrate 100 may be exposed. The planarization process may include, e.g., a chemical mechanical polishing (CMP) process and/or an etch back process. Subsequently, the polysilicon layer and the threshold voltage controlling metal layer 106 disposed at an upper portion of the recess 101 may be partially removed. Thus, the threshold voltage controlling metal pattern 106 a and the polysilicon pattern 110 a may be formed in a lower portion of the recess 101. Also, the interface insulation layer 102 and the gate insulation layer 104 formed on the upper surface of the substrate 100 may be removed.

Referring to FIG. 11 again, the upper metal pattern 114 a and the hard mask pattern 116 may be formed on the polysilicon pattern 110 a. The upper metal pattern 114 a and the hard mask pattern 116 may be formed in the recess 101. An upper surface of the hard mask pattern 116 may be coplanar with the upper surface of the substrate 100.

The impurity regions 120 may be formed at upper portions of the substrate 100 adjacent to sides of the gate structure.

FIG. 14 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments. FIG. 15 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 14 may be substantially the same as the semiconductor device shown in FIG. 1, except that the semiconductor device is a planar channel transistor. The semiconductor device shown in FIG. 15 may be substantially the same as the semiconductor device shown in FIG. 2, except that the semiconductor device is a planar channel transistor.

Referring to FIG. 14, a gate structure may be formed on a flat surface of the substrate 100, and the gate structure may include the interface insulation pattern 102 a, the gate insulation pattern 104 a, the threshold voltage controlling metal pattern 106 a, the polysilicon pattern 110 a, the diffusion barrier pattern 112 a, the upper metal pattern 114 a and the hard mask pattern 116.

The impurity regions 120 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent sides of the gate structure.

The transistor shown in FIG. 14 may be manufactured by processes the same as those illustrated with reference to FIGS. 3 to 5, except that the process for forming a recess is not performed.

Referring to FIG. 15, a gate structure may be formed on a flat surface of the substrate 100, and the gate structure may include the interface insulation pattern 102 a, the gate insulation pattern 104 a, the threshold voltage controlling metal pattern 106 a, the lower polysilicon pattern 108 a, the polysilicon pattern 110 a, the diffusion barrier pattern 112 a, the upper metal pattern 114 a and the hard mask pattern 116.

The impurity regions 120 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent sides of the gate structure.

FIG. 16 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments. FIG. 17 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 16 may be substantially the same as the semiconductor device shown in FIG. 7, except that the semiconductor device is a planar channel transistor. The semiconductor device shown in FIG. 17 may be substantially the same as the semiconductor device shown in FIG. 8, except that the semiconductor device is a planar channel transistor.

Referring to FIG. 16, a gate structure may be formed on a flat surface of the substrate 100, and the gate structure may include the gate insulation pattern 104 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and the hard mask pattern 116.

The impurity regions 120 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent sides of the gate structure.

The transistor shown in FIG. 16 may be manufactured by processes the same as those illustrated with reference to FIGS. 9 and 10, except that the process for forming a recess is not performed.

Referring to FIG. 17, a gate structure may be formed on a flat surface of the substrate 100, and the gate structure may include the gate insulation pattern 104 a, the lower polysilicon pattern 108 a, the polysilicon pattern 110 a, the upper metal pattern 114 a and the hard mask pattern 116.

The impurity regions 120 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent sides of the gate structure.

FIG. 18 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

Referring to FIG. 18, the substrate 100 may include a PMOS transistor region P and an NMOS transistor region N. The substrate 100 may include a silicon substrate.

A first isolation trench 202 a may be formed at the substrate in the PMOS transistor region P, and a second isolation trench 202 b may be formed at the substrate in the NMOS transistor region N. First and second isolation patterns 204 and 206 may be formed in the first and second isolation trenches 202 a and 202 b, respectively. The first and second isolation patterns 204 and 206 may include silicon oxide and/or silicon nitride. The substrate 100 may be divided into an active region and a field region by the first and second isolation patterns 204 and 206.

For example, the first and second isolation patterns 204 and 206 may include a silicon oxide layer 204 a and 206 a and a silicon nitride layer 204 b and 206 b sequentially stacked. The silicon oxide layer 204 a and 206 a may be conformally formed on sidewalls and bottom surfaces of the first and second isolation trenches 202 a and 202 b.

For another example, the first and second isolation patterns 204 and 206 may have a silicon nitride layer and a silicon oxide layer sequentially stacked. That is, the silicon nitride layer may be conformally formed on sidewalls and bottom surfaces of the first and second isolation trenches 202 a and 202 b.

In example embodiments, a difference between heights of top surfaces of the first and second isolation patterns 204 and 206 may be less than about 100 A. For example, the difference between the heights of the top surfaces of the first and second isolation patterns 204 and 206 may be less than about 30 Å. Therefore, defects caused by the difference between the heights of the top surfaces of the first and second isolation patterns 204 and 206 may decrease.

A first gate structure may be formed on the substrate 100 in the PMOS transistor region P.

The first gate structure may include an interface insulation pattern 212 a, a gate insulation pattern 214 a, a first threshold voltage controlling metal pattern 216 a, a second threshold voltage controlling metal pattern 225 a, a polysilicon pattern 228 a, a diffusion barrier pattern 230 a, an upper metal pattern 232 a and/or a hard mask pattern 234 stacked.

A second gate structure may be formed on substrate in the NMOS transistor region N.

The second gate structure may include the interface insulation pattern 212 a, the gate insulation pattern 214 a, the second threshold voltage controlling metal pattern 225 a, the polysilicon pattern 228 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and/or the hard mask pattern 234 stacked. The second gate structure may have a stacked structure the same as a stacked structure of the first gate structure, except that the first threshold voltage controlling metal pattern 216 a is not formed.

The first gate structure may directly contact the surface of the substrate 100 in the PMOS transistor region, and an epitaxial layer may not be formed between the surface of the substrate 100 and the first gate structure. That is, a silicon germanium layer or a carbon doped silicon germanium layer may not be formed between the surface of the substrate 100 and the first gate structure.

The second gate structure may directly contact the surface of the substrate 100 in the NMOS transistor region N. Thus, bottoms of the first and second gate structures may be coplanar with each other.

The interface insulation pattern 212 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and/or the hard mask pattern 234 included in the first and second gate structures may include materials substantially the same as materials of the interface insulation pattern, the diffusion barrier pattern, the upper metal pattern and/or the hard mask pattern illustrated with reference to FIG. 1, respectively. The polysilicon pattern 228 a may include N-type impurities or P-type impurities.

In example embodiments, the first threshold voltage controlling metal pattern 216 a may be formed as a single metal pattern. The first threshold voltage controlling metal pattern 216 a may include, e.g., titanium nitride.

In example embodiments, a thickness of the first threshold voltage controlling metal pattern 216 a may be less than about 100 Å. For example, the thickness of the first threshold voltage controlling metal pattern 216 a may be about 10 Å to about 50 Å. A difference between heights of top surfaces of the first and second gate structures may be changed depending on a thickness of the first threshold voltage controlling metal pattern 216 a. For example, the difference between the heights of the top surfaces of the first and second gate structures may be less than about 100 Å. Thus, defects caused by the difference between the heights of the top surfaces of the first and second gate structures may decrease.

In example embodiments, the second threshold voltage controlling metal pattern 225 a may be formed as a single metal pattern or two or more metal pattern. For example, the second threshold voltage controlling metal pattern 225 a may include a lanthanum pattern 222 a and a titanium nitride layer pattern 224 a stacked.

In example embodiments, first dopants may be doped in the gate insulation pattern 214 a and on upper and lower interfaces of the gate insulation pattern 214 a. That is, the first dopants may be doped within and at at least one surface of the gate insulation pattern 214 a and at an upper surface of the interface insulation pattern 212 a contacting the gate insulation pattern 214 a. The first dopants may be dopants for controlling a threshold voltage of the PMOS transistor.

In example embodiments, the first dopants may act as a negative charge in the gate insulation pattern 214 a, so that an effective work function of the first gate structure may be changed. Thus, the threshold voltage of the PMOS transistor may be controlled by the first dopants. In example embodiments, the first dopants may include fluorine, gallium or BF₂. For example, the threshold voltage of the PMOS transistor may be lowered by the first dopants.

First impurity regions 240 serving as source/drain regions may be formed at upper portions of the substrate 100 in the PMOS transistor region adjacent to sides of the first gate structure.

Second impurity regions 242 serving as source/drain regions may be formed at upper portions of the substrate 100 in the NMOS transistor region adjacent to sides of the second gate structure.

As described above, the first dopants may include in the gate insulation pattern 214 a and on the upper and lower interfaces of the gate insulation pattern 214 a, and thus the threshold voltage of the PMOS transistor may be easily controlled. For example, although the first threshold voltage controlling metal pattern 216 a may include single layer (pattern) instead of a plurality of layers (patterns) stacked, the threshold voltage of the PMOS transistor may be controlled to have a target threshold voltage.

In addition, the PMOS transistor may not be formed on an epitaxial layer (for example, a silicon germanium layer or a carbon doped silicon germanium layer). Although the PMOS transistor may be formed on a silicon substrate, the threshold voltage of the PMOS transistor may be controlled to have the target threshold voltage.

As described above, the number of stacked layers of the first threshold voltage controlling metal pattern 216 a may be reduced, and the silicon germanium layer or the carbon doped silicon germanium layer may not be formed below the PMOS transistor. Thus, the difference between the heights of the top surfaces of the first and second gate structures may decrease.

FIG. 19 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments.

The semiconductor device shown in FIG. 19 may be substantially the same as the semiconductor device shown in FIG. 18, except that lower polysilicon patterns are further included in the first gate structure and the second gate structure, respectively.

Referring to FIG. 19, a first gate structure may include the interface insulation pattern 212 a, the gate insulation pattern 214 a, the first threshold voltage controlling metal pattern 216 a, the second threshold voltage controlling metal pattern 225 a, the lower polysilicon pattern 226 a, the polysilicon pattern 228 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and the hard mask pattern 234 a stacked.

A second gate structure may include the interface insulation pattern 212 a, the gate insulation pattern 214 a, the second threshold voltage controlling metal pattern 225 a, the lower polysilicon pattern 226 a, the polysilicon pattern 228 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and the hard mask pattern 234 a stacked.

FIGS. 20 to 24 are cross-sectional views illustrating stages of a method of manufacturing a semiconductor device in accordance with example embodiments.

Referring to FIG. 20, portions of the substrate 100 may be etched to form a first isolation trench 202 a at the substrate 100 in the PMOS transistor region P and a second isolation trench 202 b at the substrate 100 in the NMOS transistor region N.

A first isolation pattern 204 may be formed in the first isolation trench 202 a, and a second isolation pattern 206 may be formed in the second isolation trench 202 b. In example embodiments, an isolation layer may be formed in the first and second isolation trenches 202 a and 202 b, and the isolation layer may be planarized until an upper surface of the substrate 100 may be exposed to form the first and second isolation patterns 204 and 206. By the planarization process, upper surfaces of the first and second isolation patterns 204 may be coplanar with each other.

An interface insulation layer 212, a preliminary gate insulation layer 213, and a first threshold voltage controlling metal layer 216 may be formed on the substrate 100 and the first and second isolation patterns 204 and 206.

As described above, a process for forming an epitaxial layer on the substrate in the PMOS transistor region may not be performed. When the epitaxial layer may be selectively formed on the substrate in the PMOS transistor region, additional processes such as forming a blocking pattern on the substrate in the NMOS transistor region and removing the blocking pattern may be performed. When the additional processes are performed, an upper portion of the first isolation pattern may be partially removed, and thus a difference between heights of top surfaces of the first and second isolation patterns may occur.

However, in example embodiments, the additional processes may not be performed, so that a difference between heights of top surfaces of the first and second isolation patterns 204 and 206 may hardly occur. In example embodiments, in the semiconductor device manufactured by subsequent processes, the difference between the heights of the top surfaces of the first and second isolation patterns 204 and 206 may be less than about 100 Å. For example, the difference between the heights of the top surfaces of the first and second isolation patterns 204 and 206 may be less than about 30 Å.

In example embodiments, plasma nitridation and heat treatment may be further performed after forming the interface insulation layer 212. In example embodiments, the first threshold voltage controlling metal layer 216 may be formed as a single layer. The first threshold voltage controlling metal layer 216 may include titanium nitride.

Referring to FIG. 21, a first lower polysilicon layer 218 may be formed on the first threshold voltage controlling metal layer.

During the process for forming the first lower polysilicon layer 218, second dopants may be doped in situ. The first lower polysilicon layer 218 may be a doping source layer for supplying first dopants to the preliminary gate insulation layer. In example embodiments, the second dopants may include fluorine, gallium or BF₂.

Then, the first lower polysilicon layer 218 may be heat-treated to downwardly diffuse the second dopants in the first lower polysilicon layer 218, so that a gate insulation layer 214 doped with first dopants may be formed. The first dopants may be substantially the same as the second dopants. The first dopants may be included in the gate insulation layer 214 and on upper and lower interfaces of the gate insulation layer 214. That is, the first dopants may be doped within and at at least one surface of the gate insulation layer 214 and at an upper surface of the interface insulation layer 212 contacting the gate insulation layer 214.

In some example embodiments, the first lower polysilicon layer 218 may not be formed. Also, the first dopants may be doped into the preliminary gate insulation layer 213 through an ion implantation process, so that the gate insulation layer 214 may be formed. Thus, the first dopants may be included in the gate insulation layer 214 and on the upper and lower interfaces of the gate insulation layer 214. In example embodiments, in the ion implantation process, implantation energy may be about 0.1 KeV to about 5 KeV, and a dose may be about 1E13 ions/cm² to about 5E15 ions/cm².

In some example embodiments, the process for forming the first lower polysilicon layer and the ion implantation process of the first dopants may not be performed in this step.

Referring to FIG. 22, the first lower polysilicon layer 218 may be removed to expose the first threshold voltage controlling metal layer 216.

A mask pattern 220 may be formed on the first threshold voltage controlling metal layer 216 to cover the first threshold voltage controlling metal layer 216 in the PMOS transistor region. The mask pattern 220 may include, e.g., a photoresist pattern.

The first threshold voltage controlling metal layer 216 exposed by the mask pattern 220 may be etched, and then the mask pattern 220 may be removed. Thus, the first threshold voltage controlling metal layer 216 may be formed only on the gate insulation layer 214 in the PMOS transistor region. Also, the gate insulation layer 214 may be exposed in the NMOS transistor region.

Referring to FIG. 23, a second threshold voltage controlling metal layer 225 may be formed on the gate insulation layer 214 and the first threshold voltage controlling metal layer 216.

A second lower polysilicon layer 226 may be formed on the second threshold voltage controlling metal layer 225.

During the deposition process for forming the second lower polysilicon layer 226, the second dopants may be doped in situ. Thereafter, the second lower polysilicon layer 226 may be heat-treated to downwardly diffuse the second dopants in the second lower polysilicon layer 226. Thus, the first dopants may be doped in the gate insulation layer 214 and on the upper and lower interfaces of the gate insulation layer 214.

In some example embodiments, the second lower polysilicon layer 226 may not be formed, and the first dopants may be doped in the gate insulation layer 214 and on upper and lower interfaces of the gate insulation layer 214 by an ion implantation process.

In some example embodiments, in the process illustrated with reference to FIG. 21, if the first dopants are sufficiently doped in the gate insulation layer 214 and on the upper and lower interfaces of the gate insulation layer 214, the doping process illustrated with reference to FIG. 23 may not be performed.

In some example embodiments, if the processes illustrated with reference to FIG. 21 are not performed, the second lower polysilicon layer 226 may be formed, and then diffusing the second dopants or ion implantation process of the first dopants may be performed in this step.

As described above, the first dopants may be included in the gate insulation layer 214 and on the upper and lower interfaces of the gate insulation layer 214 by at least one of the process illustrated with reference to FIG. 21 and the process illustrated with reference to FIG. 23.

Referring to FIG. 24, the second lower polysilicon layer 226 may be removed to expose an upper surface of the second threshold voltage controlling metal layer 225.

In some example embodiments, the removing process of the second lower polysilicon layer 226 may not be performed. When the subsequent processes are performed in the same manner without removing the second lower polysilicon layer 226, the semiconductor device shown in FIG. 19 may be manufactured.

A polysilicon layer 228 may be formed on the second threshold voltage controlling metal layer 225. In the process for forming the polysilicon layer 228, N-type impurities or P-type impurities may be doped in situ.

A diffusion barrier layer 230, an upper metal layer 232 and a hard mask layer may be sequentially formed on the polysilicon layer 228. The hard mask layer may be patterned to form a hard mask pattern 234.

Referring to FIG. 18 again, the upper metal layer 232, the diffusion barrier layer 230, the polysilicon layer 228, the second threshold voltage controlling metal layer 225, the first threshold voltage controlling metal layer 216, the gate insulation layer 214 and the interface insulation layer 212 may be etched to form a first gate structure formed on the substrate in the PMOS transistor region and a second gate structure formed on the substrate in the NMOS transistor region.

FIG. 25 is a cross-sectional view illustrating a semiconductor device in accordance with example embodiments. The semiconductor device shown in FIG. 25 may be substantially the same as the semiconductor device illustrated in FIG. 18, except that the semiconductor device is a recessed channel transistor.

Referring to FIG. 25, a first recess 101 a may be formed at the substrate 100 in the PMOS transistor region, and a second recess 101 b may be formed at the substrate 100 in the NMOS transistor region.

A first gate structure may be formed in the first recess 101 a, and a second gate structure may be formed in the second recess 101 b.

The first gate structure may include the interface insulation pattern 212 a, the gate insulation pattern 214 a, the first threshold voltage controlling metal pattern 216 a, the second threshold voltage controlling metal pattern 225 a, the polysilicon pattern 228 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and the hard mask pattern 234 stacked.

In example embodiments, the interface insulation pattern 212 a, the gate insulation pattern 214 a, the first threshold voltage controlling metal pattern 216 a and the second threshold voltage controlling metal pattern 225 a included in the first gate structure may be conformally formed on a surface of the first recess 101 a. The polysilicon pattern 228 a included in the first gate structure may fill a remaining portion of the first recess 101 a.

In example embodiments, an upper surface of the polysilicon pattern 228 a included in the first gate structure may be higher than a flat upper surface of the substrate 100. Therefore, the upper surface of the first gate structure may be higher than the flat upper surface of the substrate 100.

The second gate structure may include the interface insulation pattern 212 a, the gate insulation pattern 214 a, the second threshold voltage controlling metal pattern 225 a, the polysilicon pattern 228 a, the diffusion barrier pattern 230 a, the upper metal pattern 232 a and the hard mask pattern 234 stacked.

In example embodiments, the interface insulation pattern 212 a, the gate insulation pattern 214 a, and the second threshold voltage controlling metal pattern 225 a included in the second gate structure may be conformally formed on a surface of the second recess 101 b. The polysilicon pattern 228 a included in the second gate structure may fill a remaining portion of the second recess.

In example embodiments, an upper surface of the polysilicon pattern 228 a included in the second gate structure may be higher than the flat upper surface of the substrate 100. Therefore, the upper surface of the second gate structure may be higher than the flat upper surface of the substrate 100.

The first impurity regions 240 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent to sides of the first gate structure in the PMOS transistor region.

The second impurity regions 242 serving as source/drain regions may be formed at upper portions of the substrate 100 adjacent to sides of the second gate structure in the NMOS transistor region.

The foregoing is illustrative of example embodiments and is not to be construed as limiting thereof. Although example embodiments have been described, those skilled in the art will readily appreciate that many modifications are possible in the example embodiments without materially departing from the novel teachings and advantages of the present inventive concepts. Accordingly, all such modifications are intended to be included within the scope of the present inventive concepts as defined in the claims. In the claims, means-plus-function clauses are intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Therefore, it is to be understood that the foregoing is illustrative of various example embodiments and is not to be construed as limited to the specific example embodiments disclosed, and that modifications to the disclosed example embodiments, as well as other example embodiments, are intended to be included within the scope of the appended claims. 

What is claimed is:
 1. A semiconductor device, comprising: a substrate; an interface insulation pattern on the substrate; a gate insulation pattern on the interface insulation pattern, the gate insulation pattern including a metal oxide having a dielectric constant higher than that of silicon oxide; a threshold voltage controlling metal pattern on the gate insulation pattern; and a conductive pattern on the threshold voltage controlling metal pattern, the conductive pattern including a polysilicon, wherein first dopants are within and at at least one surface of the gate insulation pattern and at an upper surface of the interface insulation pattern contacting the gate insulation pattern, and the first dopants include at least fluorine.
 2. The semiconductor device of claim 1, wherein the gate insulation pattern includes hafnium oxide, hafnium silicon oxide, lanthanum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, lithium oxide or aluminum oxide.
 3. The semiconductor device of claim 1, wherein the conductive pattern is doped with N-type or P-type impurities, and the conductive pattern contacts the threshold voltage controlling metal pattern.
 4. The semiconductor device of claim 1, wherein the conductive pattern includes: a lower polysilicon pattern contacting the threshold voltage controlling metal pattern, the lower polysilicon pattern including second dopants including at least fluorine; and a polysilicon pattern on the lower polysilicon pattern, the polysilicon pattern doped with N-type or P-type impurities.
 5. The semiconductor device of claim 4, wherein the second dopants are the same dopants as the first dopants.
 6. The semiconductor device of claim 1, wherein the first dopants further include nitrogen, phosphorus, boron, or gallium.
 7. The semiconductor device of claim 1, wherein the threshold voltage controlling metal pattern includes TiN, TiSiN, TiAlN, TaN, AlN, WN, MoN, WCN, La, LaO, LaN, cadmium, chromium, yttrium, cerium, scandium, strontium, or erbium.
 8. The semiconductor device of claim 1, further comprising third dopants included in threshold voltage controlling metal pattern, and wherein the third dopants are the same dopants as the first dopants.
 9. The semiconductor device of claim 1, wherein the substrate further includes a recess, and a stacked structure including the interface insulation pattern, the gate insulation pattern, the threshold voltage controlling metal pattern and the conductive pattern is in the recess.
 10. The semiconductor device of claim 1, wherein an upper surface of the conductive pattern is higher than an upper surface of the substrate.
 11. The semiconductor device of claim 1, further comprising a diffusion barrier pattern, an upper metal pattern and a hard mask pattern stacked on the conductive pattern.
 12. The semiconductor device of claim 1, wherein the gate insulation pattern disposed only under the threshold voltage controlling metal pattern.
 13. A semiconductor device, comprising: a substrate including a PMOS transistor region and a NMOS transistor region; a first gate structure on the PMOS transistor region of the substrate, the first gate structure including an interfacial insulation pattern, a gate insulation pattern including a metal oxide, a first threshold voltage controlling metal pattern, a second threshold voltage controlling metal pattern, and a polysilicon pattern stacked; and a second gate structure on the NMOS transistor region of the substrate, the second gate structure including the interfacial insulation pattern, the gate insulation pattern including the metal oxide, the second threshold voltage controlling metal pattern, and the polysilicon pattern stacked; wherein the first gate structure and the second gate structure contacts a surface of the substrate.
 14. The semiconductor device of claim 13, wherein the first threshold voltage controlling metal pattern includes titanium nitride.
 15. The semiconductor device of claim 13, wherein the first threshold voltage controlling metal pattern has a thickness less than 100 Å.
 16. The semiconductor device of claim 13, wherein the second threshold voltage controlling metal pattern has a lanthanum pattern and a titanium nitride layer pattern stacked.
 17. The semiconductor device of claim 13, wherein, in the first and second gate structures, first dopants are within and at at least one surface of the gate insulation pattern and at an upper surface of the interface insulation pattern contacting the gate insulation pattern, and the first dopants include at least fluorine.
 18. The semiconductor device of claim 13, wherein, in the first and second gate structures, the polysilicon pattern directly contacts the second threshold voltage threshold voltage controlling metal pattern, and the polysilicon pattern is doped with N-type or P-type impurities.
 19. A semiconductor device, comprising: a substrate including a PMOS transistor region and a NMOS transistor region; a first gate structure on the PMOS transistor region of the substrate, the first gate structure including an interfacial insulation pattern, a gate insulation pattern including a metal oxide, a first threshold voltage controlling metal pattern, a second threshold voltage controlling metal pattern, a lower polysilicon pattern and a polysilicon pattern stacked; and a second gate structure on the NMOS transistor region of the substrate, the second gate structure including the interfacial insulation pattern, the gate insulation pattern including the metal oxide, the second threshold voltage controlling metal pattern, the lower silicon pattern and the polysilicon pattern stacked; wherein, in the first and second gate structures, first dopants are within and at at least one surface of the gate insulation pattern and at an upper surface of the interface insulation pattern contacting the gate insulation pattern, and the first dopants include at least fluorine.
 20. The semiconductor device of claim 19, wherein, in the first and second gate structures, the lower polysilicon pattern contacts the second threshold voltage controlling metal pattern, and the lower polysilicon pattern includes second dopants including at least fluorine; and the polysilicon pattern is formed on the lower polysilicon pattern, the polysilicon pattern is doped with N-type or P-type impurities. 